PLANSEE Advanced Standard Ion Source Offers 30% Longer Lifetime
PLANSEE’s Advanced Standard designs are made from high-performance metals, graphite, and ceramics and are available for most commercial ion implantation tools worldwide. PLANSEE’s most recent development is an extended life ion source for the Exceed IHC 9600 implantation system from Nissin. This source has been successfully qualified by a major IDM in a high volume manufacturing environment.
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